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Pneumatic Servo Valve - List of Manufacturers, Suppliers, Companies and Products

Pneumatic Servo Valve Product List

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Nozzle Flapper Type Pneumatic Servo Valve "AS110 Series"

Nozzle Flapper Type Pneumatic Servo Valve "AS110 Series"

High-speed response (above 400Hz)! A long-lasting pneumatic servo valve with no sliding parts.

The "AS110 series" is a nozzle flapper type three-way valve that uses a torque motor in the electrical-mechanical conversion section. The movable part of the torque motor, the armature, is integrated with the flapper and is supported by a flexible tube. When current is applied to the coil, torque is generated according to the polarity and magnitude of the current due to the magnetic relationship between the upper and lower magnetic poles, tilting the armature. A gap is pre-established between the nozzle and the flapper, and the air pressure is controlled by changing the opening of the nozzle section on the supply side and exhaust side according to the movement of the flapper. 【Features】 ■ Low drive current ■ High resolution and low hysteresis ■ Compact, lightweight, and small flow control *For more details, please download the PDF or feel free to contact us.

  • Pneumatic Equipment

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Nozzle Flapper Type Pneumatic Servo Valve "AS100 Series"

Nozzle Flapper Type Pneumatic Servo Valve "AS100 Series"

No moving parts and long lifespan! Introducing the pneumatic servo valves we handle.

The "AS100 series" is a nozzle flapper type servo valve that uses a torque motor in the electrical-mechanical conversion section. When current is applied to the coil, torque is generated according to the polarity and magnitude of the current due to the magnetic relationship between the upper and lower magnetic poles, which tilts the armature. Additionally, a gap is pre-established between the nozzle and the flapper, and the air pressure is controlled by changing the opening of the nozzle on the supply and exhaust sides in accordance with the movement of the flapper. 【Features】 ■ High-speed response ■ Low drive current ■ High resolution and low hysteresis ■ No sliding parts for long life ■ Compact, lightweight, and small flow control * For more details, please refer to the PDF materials or feel free to contact us.

  • Pneumatic Equipment

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VCM-driven pneumatic servo valve (direct-acting pneumatic servo valve)

VCM-driven pneumatic servo valve (direct-acting pneumatic servo valve)

Precision control through moving coil drive! Achieving high-speed response with a lightweight guide valve.

We would like to introduce our "VCM-driven (direct acting) pneumatic servo valve." This is a spool-type servo valve that uses a movable coil type force motor in the electrical-mechanical conversion section. It performs precise control through moving coil drive and is mainly used in the field of semiconductor manufacturing equipment (such as precision positioning stages). We offer "flow control 3-way valves/5-way valves" and "pressure control 3-way valves." 【Features】 ■ High flow rate ■ High resolution, low hysteresis ■ Low error and long lifespan due to static pressure bearings ■ Minimal internal leakage ■ High-speed response achieved with lightweight guide valves ■ Position control (flow control valve) using digital or analog sensors *For more details, please refer to the PDF materials or feel free to contact us.

  • Servo

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Small Pneumatic Servo Valve "Pneumatic Servo Valve J814 Series"

Small Pneumatic Servo Valve "Pneumatic Servo Valve J814 Series"

Air pressure servo valve with a rated flow of 1 to 200 NL/min. Compact structure with high responsiveness and high precision. Ideal for robotics, semiconductor manufacturing, and animatronics!

The "Pneumatic Servo Valve J814 Series" is a compact pneumatic servo valve that supports 3-way or 4-way configurations, featuring high torque, high response, and high precision. It has good reproducibility of the control pressure against the command signal, making it suitable for controlling pressure, force, position, and vibration. It can also create a vacuum state. Typical applications include robotics, semiconductor manufacturing equipment, animatronics, active vibration isolation devices, load testing machines, internal pressure control devices, and pressing force control devices. 【Features】 ■ Single-stage nozzle flapper valve using a torque motor ■ High resolution and low hysteresis ■ Compact, lightweight, and high responsiveness ■ Robust and long-lasting design with no sliding parts *For more details, please download the catalog or contact us.

  • Piping Materials
  • Servo

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Nozzle flapper type pneumatic servo valve "AS121-106"

Nozzle flapper type pneumatic servo valve "AS121-106"

The amateur is integrated with the flapper and is supported by a flexible tube.

The nozzle flapper type servo valve "AS121-106" uses a torque motor in the electrical-mechanical conversion section and is a low-noise type four-way valve composed of a variable resistor (nozzle flapper) and a fixed resistor (slit orifice). The slit orifice forms a flow path in conjunction with the variable orifice, which is the nozzle. Unlike a conventional orifice that is a contraction orifice, the slit orifice creates an expanded flow through slits from the center to the outer circumference, thereby reducing the flow from the inlet to the outlet. By reducing the supersonic flow at the outlet, it stabilizes the orifice and minimizes noise in the control pressure. 【Specifications】 ■ Rated pressure: 600 kPa ■ Rated flow rate: 28 NL/min ■ Rated current: 100 mA *For more details, please download the PDF or feel free to contact us.

  • Pneumatic Equipment

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Nozzle Flapper Type Pneumatic Servo Valve 【Achieves fine control with pneumatic pressure】

Nozzle Flapper Type Pneumatic Servo Valve 【Achieves fine control with pneumatic pressure】

Compact, lightweight, precise, and long-lasting! *If the air is clean, it is basically maintenance-free!

Introducing our "Nozzle Flapper Type Pneumatic Servo Valve." It is a compact and lightweight servo valve capable of controlling relatively small flow rates with high responsiveness. ~Operating Principle~ The movable part of the torque motor, the armature, is integrated with the flapper and supported by a flexible tube. When current is applied to the coil, torque is generated, tilting the armature. A gap is pre-established between the nozzle and the flapper, allowing the nozzle opening to change in response to the flapper's movement, thereby controlling the air pressure. We also offer products equipped with a "disk throttle," which reduces output noise by minimizing the speed of sound flow at the outlet, achieving stable throttling. 【Features】 ■ No sliding parts ■ High resolution and fast response ■ Compact, lightweight, and easy to handle ■ Capable of negative pressure control structure *<Compatible Servo Amplifier>* We also have the "CA250 Series" servo amplifier, developed to use the pneumatic servo valve in optimal conditions. By configuring a 30mA drive amplifier with a sensor amplifier (LVDT, strain gauge sensor) and a preamplifier, a simplified control system can be constructed. For more details, please feel free to contact us.

  • Servo

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Feedback-type pneumatic servo valve

Feedback-type pneumatic servo valve

Achieve high-speed response with a lightweight guide valve! A two-stage servo valve with mechanical feedback.

The "Feedback-type Pneumatic Servo Valve" has achieved miniaturization by amplifying power in the front section. High-speed response is made possible by a lightweight guide valve equipped with precisely machined static pressure bearings. It features a two-stage servo valve with mechanical feedback. The rated pressure is 600 kPa, and the rated current is 30 mA. Please feel free to contact us if you need assistance. 【Features】 ■ Two-stage servo valve with mechanical feedback ■ High-speed response achieved with a lightweight guide valve equipped with precisely machined static pressure bearings ■ Miniaturization realized by amplifying power in the front section *For more details, please refer to the PDF document or feel free to contact us.

  • Servo

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Ultra-small nozzle flapper type pneumatic servo valve

Ultra-small nozzle flapper type pneumatic servo valve

Contributing to the miniaturization of devices!

Introducing the ultra-compact three-way valve of the "Nozzle Flapper Type Pneumatic Servo Valve" using a torque motor in the electric-mechanical conversion section. The driving principle is similar to that of a standard nozzle flapper type pneumatic servo valve as follows: When current is applied to the coil, torque is generated according to the polarity and magnitude of the current due to the magnetic relationship with the upper and lower magnetic poles, tilting the armature. A gap is pre-established between the nozzle and the flapper, and the air pressure is controlled by changing the opening of the nozzle sections on the supply and exhaust sides in response to the movement of the flapper. By miniaturizing the valve, it also contributes to the overall downsizing of the equipment it is mounted on, and it is considered suitable for small robots and other animatronics. 【Features】 ■ High-speed response (above 400Hz) ■ Low drive current ■ High resolution and low hysteresis ■ No sliding parts for long lifespan ■ Compact, lightweight, and small flow control *For more details, please refer to the PDF document or feel free to contact us.

  • Servo

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